PULPCDIMP · Pioneering Ultra-Low Power Computing: A Disruptive Integrated Mechanics Paradigm

Nanoelectromechanical (NEMS) switches offer 10 to 100 times less power consumption than conventional transistors, but their widespread adoption is hindered by challenges related to adhesion, electrical contact resistance (ECR), and in-operando property evolution. This project aims to address these issues by developing reliable interface coatings capable of withstanding the harsh conditions of NEMS interface, such as high stresses, repetitive cycling, and Joule heating. Oxide formation on metal contacts is unavoidable, unlike tribopolymers. Though they are typically insulators, but can conduct electricity via electron dispersion and are proven effective in harsh environments. Oxides also offer advantages over metals, including high strength, low adhesion, and resistance to creep and fatigue, and can replace metal contacts completely. The proposal turns the liability into an advantage by considering oxides as a potential solution for NEMS switch interface. The project will use a materials genome search to select hard oxides with distinct conduction mechanisms—semimetals (RhO2, RuO2, TiOx), semiconductors (TiO2), and oxides with oxygen vacancies (Ta2Ox). Advanced characterization techniques such as TEM, XRD, and XPS will assess coating quality. To streamline the complex fabrication and testing process, an innovative in-situ AFM method with integrated plasma cleaning (to ensure clean environment), and controlled environment will be developed, enabling real-time monitoring of asperity interactions. This approach will directly link nano-asperity responses to actual NEMS interfaces. MD simulations will guide experiments, provide atomic-level insights, and develop semi-empirical prediction models for further development of NEMS switch architecture. This project aims to revolutionize energy-efficient computing by addressing tribo-chemo-electro-mechanics challenges at the NEMS interface, driving advancements in communication, transportation, sensing, medicine, and defense.