FIBLYS · Multi-functional Analytical Focussed ion beam tool for nanotechnology

The project FIBLYS aims at developing an innovative nanostructuring, nanomanipulation and nanoanalysis instrument: a hybrid scanning probe (SPM) and dual beam focussed ion beam (FIB) instrument (including scanning electron microscopy (SEM) capabilities). In addition to an instrument based on conventional dual beam FIB(SEM) technology, an SPM/FIB(SEM) microscope will use both techniques, integrated in a compact setup offering capabilities that not only combine the techniques but allow for nanoanalysis and nanostructuring/-manipulation options that the single instrument or sequential use of the techniques is unable to achieve. This FIBLYS hybrid device will allow to use all FIB capabilities while imaging the procedures with the integrated SEM. The SEM has the options of chemical analysis through Energy Dispersive X-ray analysis (EDX) and structural analysis through Electron Backscatter diffraction (EBSD). The combination of SEM and SPM provides for the combination of nano-scale chemistry and crystallography imaging via electron-matter interactions (EDX, EBSD) with the information from tip-sample interactions like topography or magnetic/electrostatic force imaging. Combining electron-matter and tip-sample interactions, the FIBLYS hybrid instrument will for the first time allow to probe with nano-scale resolution many electron-matter interactions like detection of electron beam induced current (EBIC), or cathodoluminescence or phonons, or backscattered electrons directly at the surface with cantilever based sensors. This project will merge FIB(SEM) and SPM manufacturers at European level and reinforce their competitiveness. The partnership reflects the excellence and competences needed in this project, only possible through transnational co-operative research of six SMEs (SPM and FI(SEM) manufacturers, specialists in SPM and SEM control, expertise in electron/ion optics, cantilever manufacturers for SPM techniques as well as three RTD performers.